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Table 2

Comparison of PD and PGL under joint adjustment of the ten actuators in Figure 7a obtained by POSM and SP.

Stroke of actuators Performance indices


Actuator No. Strokes (μm) PD’s φ (°) PD’s θ (arcsec) PGL (dB)
7 −8.7 68.2130 0.0173 0.0009
14 48.1 235.2847 0.1152 0.0494
27 39.8 306.5871 0.1094 0.0566
39 −84.7 158.9485 0.1613 0.1525
53 75.6 171.7869 0.1094 0.0680
64 25.7 157.5893 0.0576 0.0123
66 14.3 136.1024 0.0403 0.0087
69 33.6 43.8976 0.0922 0.0479
70 32.5 29.9997 0.0922 0.0319
85 −71.5 278.9484 0.1555 0.1176

SP based on POSM for individual actuator adjustment 207.7435 0.1860 0.5458
POSM for joint actuator adjustments 208 0.1843 0.5906

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