Fig. 18.
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Photon transfer curve (PTC) curves showing the matching of the HG and LG pixel values obtained with EUV light at 17.4 nm. The HG lowest detected signal has a signal sigma of 3 e− rms, which corresponds to its expected readout noise, at the detection limit. Due to the protection measure on the detector, the EUV flux was kept low so the saturation was not reached and no full well saturation is visible.
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