Fig. 7
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Schematic summarizing different procedures to determine refractive indices from spectroscopic and ellipsometric data spanning UV to far-IR. The data include transmission (T), reflection (R), and the ellipsometric angles (Δ and Ψ). The values f and s refer to film and substrate, respectively; θi is the angle of incidence on the sample during the measurement; and d refers to the thickness of the film (df) and substrate (ds). SSKK refers to the singly subtractive Kramers–Kronig equation (Eq. (11)) describing the correlation between n and k values.
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